采用线切割将样品切割成0.5 mm×0.5 mm×20 mm的方形细棒。通过两步电解抛光制备成曲率半径小于100 nm的针尖样品。在Cameca Leap 4000 HR型三维原子探针进行试验,在20~70K的温度下给针尖样品上加直流电压,再叠加一个直流脉冲电压使原子能够逐层电离并蒸发,利用飞行时间质谱仪测定离子的质量与电荷之比来确定该离子的种类,热轧态样品中各种元素均匀分布。
The sample was cut into 0.5 mm × 0.5 mm × 20 mm square rods by wire cutting. A tip sample with curvature radius less than 100 nm was fabricated by two-step electrochemical polishing. The Cameca Leap 4000 HR three-dimensional atomic probe was tested. The DC voltage was added to the tip sample at the temperature of 20 ~ 70 K, and then a DC pulse voltage was superimposed to enable the atom to be ionized and evaporated layer by layer. The mass-charge ratio of the ion was determined by time-of-flight mass spectrometer to determine the type of the ion. The various elements in the hot rolled sample were evenly distributed.